# | Class | status | |
---|---|---|---|
1 |
S:76365573
M:FIREFLY O:Firefly Technologies, Inc. |
9 | Dead |
2 |
S:76032157
M:MICROLUPI 2000 O:Firefly Technologies, Inc |
9 | Dead |
3 |
S:76032145
M:MICROLUPI O:Firefly Technologies, Inc, Zygo Corporation, Zygo Teraoptix, Inc. |
9 | Dead |